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RISBiLSTMBased Dynamic Prediction Model for Pulling Speed of Czochralski SingleCrystal Furnace
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: With the rapid development of microelectronics science and technology, the quality of ICgrade silicon single crystal directly affects the yield and stability of the performance of semiconductor device production. As the ...
Bi-LSTM-Based Dynamic Prediction Model for Pulling Speed of Czochralski Single-Crystal Furnace
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: With the rapid development of microelectronics science and technology, the quality of IC-grade silicon single crystal directly affects the yield and stability of the performance of semiconductor device production. As the ...