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    Dynamic Modeling and Vibration Analysis of the Atomic Force Microscope 

    Source: Journal of Vibration and Acoustics:;2001:;volume( 123 ):;issue: 004:;page 502
    Author(s): Rong-Fong Fung; Shih-Chien Huang
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: The objective of this paper is to formulate the equations of motion and to investigate the vibrations of the atomic force microscope (AFM), which is divided into the contact and noncontact ...
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