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RISFabrication of Micro Single Chamber Solid Oxide Fuel Cell Using Photolithography and Pulsed Laser Deposition
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: This paper focuses on the fabrication of microcoplanar interdigitated single chamber solid oxide fuel cell (خ¼SCSOFC) using a combination of micropatterning technique and thinfilm deposition technology. Photolithography ...