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Thesaurus-Guided Text Analytics Technique for Capability-Based Classification of Manufacturing Suppliers
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Manufacturing capability (MC) analysis is a necessary step in the early stages of supply chain formation. In the contract manufacturing industry, companies often advertise their capabilities and services in an unstructured ...
Optical Metrology of Critical Dimensions in Large-Area Nanostructure Arrays With Complex Patterns
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: It was recently demonstrated that scatterometry-based metrology has the capability to perform high-throughput metrology on large-area nanopatterned surfaces. However, the way this approach is currently pursued requires an ...