Abstract: Low scanning speed of piezo-probes has been a fundamental limitation of scanning probe based nano-fabrication techniques. Typical scan-rates achieved are limited, by structural vibrations of the ...

Abstract: This article studies ultra-high-precision positioning with piezoactuators and illustrates the results with an example Scanning Probe Microscopy (SPM) application. Loss of positioning precision in ...

Abstract: In this paper we study the optimal redesign of output trajectories for linear invertible systems. This is particularly important for tracking control of flexible structures because the input-state ...

Abstract: This article models the dynamics of cilia-based devices (soft cantilever-type, vibrating devices that are excited by external vibrations) for mixing and manipulating liquids in microfluidic ...

Abstract: This article shows that the added mass due to fluid-structure interaction significantly affects the vibrational dynamics of cilia-based (vibrating cantilever-type) devices for handling microscale ...