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RISFully Lagrangian Modeling of Dynamics of MEMS With Thin Beams—Part I: Undamped Vibrations
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Micro-electro-mechanical systems (MEMSs) often use beam or plate shaped conductors that can be very thin—with h/L≈O(10–2–10–3) (in terms of the thickness h and length L of the beam or side of ...
Fully Lagrangian Modeling of Dynamics of MEMS With Thin Beams—Part II: Damped Vibrations
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Micro-electro-mechanical systems (MEMS) often use beam or plate shaped conductors that are very thin with h/L≈O(10−2–10−3) (in terms of the thickness h and length L of a beam or side of a ...