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Deposition of TRISO Particles With Superhard SiC Coatings and the Characterization of Anisotropy by Raman Spectroscopy
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: In this work we have deposited silicon carbide (SiC) at 1300°C with the addition of small amounts of propylene. The use of propylene and high concentrations of methyltrichlorosilane (9 vol ...