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RISSynthesis of Coatings With Hardness Exceeding 40 GPa by Magnetron Sputtering
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Single- and dual-cathode DC magnetron sputtering was used to produce TiB2 coatings and CNx /ZrN multilayers, respectively, with hardness exceeding 40 GPa. The composition, structure, topography, ...