Abstract: This article introduces a novel hole edge inspection and metrology technology by edge diffractometry, which occurs when light interacts with the hole edge. The proposed method allows for simultaneous characterization of ...

Abstract: This paper introduces a novel wafer-edge quality inspection method based on analysis of curved-edge diffractive fringe patterns, which occur when light is incident and diffracts around the wafer edge. The proposed method ...

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Abstract: Misalignment is common in hydrodynamic journal bearings and the causes of it can be diversified, making the lubrication performance exhibits stochasticity. Lubricant viscosity often heavily depends on temperature, which ...