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Pulse Breakdown in Sub-20 nm Organic Dielectrics for Nanoscale-Electromachining (nano-EM)
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Nano-electromachining (nano-EM) is a process in which electric fields applied across sub-20 nm tool-workpiece gaps in organic dielectrics (n-decane C10H22 and n-undecane C12H26) are used to produce ...