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RISNumerical Investigation of Effect of Operating Parameters on the Phase Transformation During Vibration-Assisted Nano-Impact Machining of Silicon by Loose Abrasives
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Vibration-assisted nano-impact machining by loose abrasives (VANILA) is a newly developed process based on the atomic force microscope (AFM) platform, where the nanoabrasive (diamond particles) slurry is injected between ...