Search
CSV
RISJet-Flow Scavenging of a Curing Oven—Part II: Numerical Simulation
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: In this part the heat, mass, and momentum transfer within a curing over that is commonly used in microelectronic manufacturing have been numerically analyzed. The local partial pressure of the ...
Jet-Flow Scavenging of a Curing Oven—Part I: Flow Visualization
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: A curing oven that is commonly used in microelectronic manufacturing has been analyzed to determine the causes of contamination of parts passing through the oven, and to eliminate this ...