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RISNoncontact SThM Thermal Conductivity Measurements of GeSbTe Thin Films Sputtered on Silicon and Glass Substrates
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Chalcogenide materials based on germanium–antimony–tellurium (GST) are typically used in phase change memory (PCM) applications. The thermal conductivity of GST films is an important factor in predicting the temperature ...