Abstract: In highly flexible and integrated manufacturing systems, such as semiconductor manufacturing, the strong dynamic interactions between the equipment condition, operations executed on the equipment, and the resulting product ...

Abstract: It was recently demonstrated that scatterometry-based metrology has the capability to perform high-throughput metrology on large-area nanopatterned surfaces. However, the way this approach is currently pursued requires an ...

Abstract: In this paper, a dual-mode model predictive/linear control method is presented, which extends the concept of dual-mode model predictive control (MPC) to trajectory tracking control of nonlinear dynamic systems described ...

Abstract: This paper presents evaluation of the energy consumption and tracking performance associated with the use of a recently introduced dual-mode model predictive controller (DMMPC) for control of a heating, ventilation, and ...

Abstract: Dramatic advancements and adoption of computing capabilities, communication technologies, and advanced, pervasive sensing have impacted every aspect of modern manufacturing. Furthermore, as society explores the Fourth ...