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RISDesign Space of Single-Loop Planar Folded Micro Mechanisms With Out-of-Plane Motion
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Microelectromechanical systems (MEMS) are usually fabricated using planar processing methods such as surface micromachining, bulk micromachining, or LIGA-type fabrication. If a micro mechanism is ...
Spherical Bistable Micromechanism
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: A new micromechanism, the spherical bistable micromechanism (SBM), is described. The SBM has several advantageous features, which include two stable positions that require power only in transitioning ...
Components, Building Blocks, and Demonstrations of Spherical Mechanisms in Microelectromechanical Systems
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Microelectromechanical systems (MEMS) are usually fabricated using planar processing methods, which complicates the design of devices capable of complex motions. For applications that need a ...