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    A Model for Temperature Rise of Polishing Process Considering Effects of Polishing Pad and Abrasive 

    Source: Journal of Tribology:;2004:;volume( 126 ):;issue: 003:;page 422
    Author(s): Jeng-Haur Horng; Yeau-Ren Jeng; Chun-Liang Chen
    Publisher: The American Society of Mechanical Engineers (ASME)
    Abstract: The contact temperature plays an important role in the polishing process, which essentially is a surface contact abrasion process. This paper reports a contact temperature model to predict the ...
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