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RISMechanical Properties of Nanocomposite TiN/Si3N4 Films Synthesized by Ion Beam Assisted Deposition (IBAD)
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Nanocomposite coatings of TiN/Si3N4 have been prepared by ion beam assisted deposition (IBAD): simultaneous sputtering of Ti and Si targets and film bombardment by N2+ ions at 1000 eV. The ...