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RISThree-Dimensional Profile Reconstruction and Internal Defect Detection of Silicon Wafers Using Cascaded Fiber Optic Fabry–Pérot Interferometer and Leaky Field Detection Technologies
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Wafer quality control is one of the important processes to improve the yield rate of semiconductor products. Profile quality and defects in the wafer are two key factors that should be taken into consideration. In this ...
Machine Straightness Error Measurement Based on Optical Fiber Fabry–Pérot Interferometer Monitoring Technique
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: In this research, we propose an Error Separation Technique (EST) based on optical fiber sensors for on-machine straightness error measurement. Two fiber optic Fabry–Pérot interferometers have been developed serving as two ...