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RISMeasurements of Piezoelectric Coefficient d33 of Lead Zirconate Titanate Thin Films Using a Mini Force Hammer
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Lead zirconate titanate (PbZrxTi1xO3, or PZT) is a piezoelectric material widely used as sensors and actuators. For microactuators, PZT often appears in the form of thin films to maintain proper aspect ratios. One major ...
Effects of Added Mass on Lead-Zirconate-Titanate Thin-Film Microactuators in Aqueous Environments
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: In this paper, we conduct experimental, theoretical, and numerical studies of a lead-zirconate-titanate (PZT) thin-film microactuator probe submerged in water. The major component of the actuator is a PZT diaphragm anchored ...
Voltage-Induced Snap-Through of an Asymmetrically Laminated, Piezoelectric, Thin-Film Diaphragm Micro-Actuator—Part 1: Experimental Studies and Mathematical Modeling
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: A piezoelectric thin-film microactuator in the form of an asymmetrically laminated diaphragm is developed as an intracochlear hearing aid. Experimentally, natural frequencies of the microactuator bifurcate with respect to ...