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RISAn Ultraminiature MEMS Pressure Sensor With High Sensitivity for Measurement of Intramuscular Pressure (IMP) in Patients With Neuromuscular Diseases
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: An ultraminiature micropressure sensor to accurately measure intramuscular pressure has been developed. The MEMS sensor is fabricated through surface micromachining and consists of a capacitive ...