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RISOn the Application of the Multiple Scales Method on Electrostatically Actuated Resonators
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: We investigate modeling the dynamics of an electrostatically actuated resonator using the perturbation method of multiple time scales (MTS). First, we discuss two approaches to treat the nonlinear parallel-plate electrostatic ...
Theoretical and Experimental Investigation of Two-to-One Internal Resonance in MEMS Arch Resonators
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: We investigate theoretically and experimentally the two-to-one internal resonance in micromachined arch beams, which are electrothermally tuned and electrostatically driven. By applying an electrothermal voltage across the ...