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RISMolding of Deep Polydimethylsiloxane Microstructures for Microfluidics and Biological Applications
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Here we demonstrate the microfabrication of deep (>25 μm) polymeric microstructures created by replica-molding polydimethylsiloxane (PDMS) from microfabricated Si substrates. The use of PDMS ...