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contributor authorN. Tsuda
contributor authorK. Nakano
contributor authorM. Sawabe
date accessioned2017-05-08T23:09:16Z
date available2017-05-08T23:09:16Z
date copyrightAugust, 1980
date issued1980
identifier issn1087-1357
identifier otherJMSEFK-27685#195_1.pdf
identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/93562
description abstractA newly developed apparatus that can afford fine displacement and angle is reported here. The characteristics of this is to make use of elastic deformation and to be manufactured as firmly as possible in a solid structure. The experimental results show that adjusting rectilinear displacement can be set within 0.01 μm, and this apparatus can perform paralleled movement of 4 μm displacement within 0.01 seconds of arc, moreover can set the given angles, for example 1.0, 0.5 and 0.2 seconds of arc correctly and easily.
publisherThe American Society of Mechanical Engineers (ASME)
titleSuper Microscopic Displacement and Angle Adjusting Instrument
typeJournal Paper
journal volume102
journal issue3
journal titleJournal of Manufacturing Science and Engineering
identifier doi10.1115/1.3183854
journal fristpage195
journal lastpage200
identifier eissn1528-8935
keywordsInstrumentation
keywordsDisplacement AND Deformation
treeJournal of Manufacturing Science and Engineering:;1980:;volume( 102 ):;issue: 003
contenttypeFulltext


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