| contributor author | Somأ , Aurelio | |
| contributor author | De Pasquale, Giorgio | |
| date accessioned | 2017-05-09T01:34:34Z | |
| date available | 2017-05-09T01:34:34Z | |
| date issued | 2016 | |
| identifier issn | 1048-9002 | |
| identifier other | vib_138_01_011013.pdf | |
| identifier uri | http://yetl.yabesh.ir/yetl/handle/yetl/162869 | |
| description abstract | The control of electrostatically actuated microsystems with openloop strategies has the potential to reduce the switching time with immediate benefits on device performances and, on the other hand, to reduce the impact velocity between electrodes with benefits on the device lifetime and reliability. By applying to microelectromechanical systems (MEMS) the controlled methods already validated on machines, it was demonstrated that the accuracy of the control is scalable with the dimensions. Residual vibrations of microstructures in the nanometer range are almost completely suppressed: they are reduced to 6% of the uncontrolled vibration amplitude. The reasons for implementing this kind of control are related to reliability enhancement, by reducing the impact velocity, and for the improvement of device dynamic performances. The robustness of the control method against errors in dynamic parameters evaluation was also demonstrated. | |
| publisher | The American Society of Mechanical Engineers (ASME) | |
| title | Preshaping Command Functions to Control the Dynamic Impacts in MEMS | |
| type | Journal Paper | |
| journal volume | 138 | |
| journal issue | 1 | |
| journal title | Journal of Vibration and Acoustics | |
| identifier doi | 10.1115/1.4031754 | |
| journal fristpage | 11013 | |
| journal lastpage | 11013 | |
| identifier eissn | 1528-8927 | |
| tree | Journal of Vibration and Acoustics:;2016:;volume( 138 ):;issue: 001 | |
| contenttype | Fulltext | |
