Mesoscale Robotic Assembly With Orthogonal Optical Alignment for UV LIGA Parts

Abstract

This paper proposes an assembly system for ultravioletlithographie galvanik abformung (UVLIGA) parts with a robotic manipulator. Both images of base part and object part could be obtained simultaneously from an inhouse orthogonal optical alignment vision system. Two microgrippers were introduced to realize the reliable clamping. An initial calibration method was presented to ensure assembly accuracy. Assembly experiments were conducted with success rates of 80% and the time consumption of 20 min for all four parts assembly. Suspected causes of failure are motion mechanisms' uncertainty, part dislocation resulted from inertia force when microgripper is moving, and the error which is produced in the detection process because of random factors.