Impulse-Load Dynamics of Squeeze Film Gas Bearings for a Linear Motion Guide

Abstract

This paper deals with a noncontact moving table using squeeze-film gas bearings for a linear motion guide, and investigates the dynamic behavior of the moving table under impulse load, experimentally and numerically, to clarify the dynamic characteristics of a squeeze-film gas bearing. This squeeze bearing for a noncontact moving table uses piezoelectric actuators as an ultrasonic vibrator to make the bearing surface vibrate at the ultrasonic resonant frequency of the bearing plate. The squeeze-film pressure is generated in the gap beneath the vibrating bearing surface and can support the moving table without any contact. It was consequently found that the numerical calculation method presented in this paper could predict well the dynamic behavior of the moving table using the squeeze-film gas bearing under impulse load.