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contributor authorGuillaume Pandraud
contributor authorMartine Le Berre
contributor authorPanagiota Morfouli
contributor authorMonique Lallemand
date accessioned2017-05-09T00:19:36Z
date available2017-05-09T00:19:36Z
date copyrightSeptember, 2006
date issued2006
identifier issn1528-9044
identifier otherJEPAE4-26264#294_1.pdf
identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/133535
description abstractAn experimental study was conducted to determine the performances of silicon microheat pipes (MHPs) filled with different fluids. The MHP arrays are made of 27 triangular microchannels chemically etched in a silicon wafer. This wafer is closed by molecular bonding of a bulk oxidized silicon wafer. The results show that the use of MHPs with low liquid charges can increase the effective thermal conductivity of the array. The best improvement of the effective thermal conductivity of the MHP array is equal to 41% for methanol and pentane, 12% for ethanol and nil for water and FC72.
publisherThe American Society of Mechanical Engineers (ASME)
titleInfluence of the Fluid on the Experimental Performances of Triangular Silicon Microheat Pipes
typeJournal Paper
journal volume128
journal issue3
journal titleJournal of Electronic Packaging
identifier doi10.1115/1.2229233
journal fristpage294
journal lastpage296
identifier eissn1043-7398
keywordsSemiconductor wafers
keywordsThermal conductivity
keywordsPipes
keywordsFluids
keywordsSilicon
keywordsMethanol
keywordsMicrochannels
keywordsBonding
keywordsWater
keywordsEthanol AND Temperature
treeJournal of Electronic Packaging:;2006:;volume( 128 ):;issue: 003
contenttypeFulltext


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