Active Vibration Isolation of Metrology Frames; A Modal Decoupled Control Design

Abstract

For a six degree-of-freedom active vibration isolation system, a control strategy based on modal decoupling is proposed. This has the advantage of controlling the modal directions on a centralized single-input single-output basis. As a consequence, stability and performance can be imposed in each of the modal directions separately. An experimental demonstration is given using a dummy metrology frame. That is, a 1600 kg payload mass supported by three combined pneumatic and Lorentz controlled isolators. With this setup, two unstable modal directions resulting from a high center of gravity are stabilized without compromising performance in any of the remaining directions. In fact, performance in the remaining directions is enhanced using manual loop shaping.