Novel Sensor Fabrication Using Direct-Write Thermal Spray and Precision Laser Micromachining

Abstract

This work presents a direct-write technique for rapid prototyping and manufacturing of sensors onto structural and functional components for many diverse applications. The technique combines thermal spray (an additive process), which produces blanket depositions of films and coatings, with ultrafast laser micromachining (a subtractive process) to produce functional sensors. Microheaters and strain gauges have been successfully fabricated in this work to demonstrate the feasibility and advantages of the proposed technique. Electrical and thermal characterization of the sensors is also performed. With minor modifications to the pattern design and processing procedures, additional sensing structures and electronic components, for example, precision resistors and interdigitated capacitors, can be fabricated using the presented technique.