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contributor authorR. L. Davis
contributor authorJ. W. Jackson
date accessioned2017-05-08T23:55:21Z
date available2017-05-08T23:55:21Z
date copyrightSeptember, 1967
date issued1967
identifier issn0098-2202
identifier otherJFEGA4-27300#541_1.pdf
identifier urihttp://yetl.yabesh.ir/yetl/handle/yetl/119756
description abstractThis paper represents an analysis of the pressure distribution occurring in axially loaded cylindrical wafers with, and without, elastic radial constraints. The purpose of this report is to demonstrate the resulting stress patterns that occur in short compression specimens frequently used in determining material properties, and in the opposed-anvil, or Bridgman-type, high-pressure cells. The influence of radial constraints, material strain hardening, wafer diameter-to-height ratio, anvil or plate deflection, and the wafer-anvil interface friction on the resulting stress distributions have been examined. The integrated normal stress distribution across the specimen surface has been verified experimentally via numerous tests in which each of the subject parameters listed above was varied.
publisherThe American Society of Mechanical Engineers (ASME)
titleA Plastic Stress Analysis of Cylindrical Wafers Under Elastically Deformable Compression Plates
typeJournal Paper
journal volume89
journal issue3
journal titleJournal of Fluids Engineering
identifier doi10.1115/1.3609655
journal fristpage541
journal lastpage550
identifier eissn1528-901X
keywordsSemiconductor wafers
keywordsPlates (structures)
keywordsCompression
keywordsStress analysis (Engineering)
keywordsStress
keywordsHigh pressure (Physics)
keywordsPressure
keywordsFriction
keywordsDeflection
keywordsWork hardening
keywordsStress concentration AND Materials properties
treeJournal of Fluids Engineering:;1967:;volume( 089 ):;issue: 003
contenttypeFulltext


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