| contributor author | M. Datta | |
| contributor author | R. V. Shenoy | |
| contributor author | L. T. Romankiw | |
| date accessioned | 2017-05-08T23:50:55Z | |
| date available | 2017-05-08T23:50:55Z | |
| date copyright | February, 1996 | |
| date issued | 1996 | |
| identifier issn | 1087-1357 | |
| identifier other | JMSEFK-27784#29_1.pdf | |
| identifier uri | http://yetl.yabesh.ir/yetl/handle/yetl/117337 | |
| description abstract | The present paper reviews some fundamental aspects related to the understanding of the high rate anodic dissolution processes and their influence on thin film patterning by electrochemical micromachining. The role of convective mass transport and current distribution on the surface finish and shape evolution is discussed. Several examples of the applications of maskless and through-mask electrochemical micromachining are presented. | |
| publisher | The American Society of Mechanical Engineers (ASME) | |
| title | Recent Advances in the Study of Electrochemical Micromachining | |
| type | Journal Paper | |
| journal volume | 118 | |
| journal issue | 1 | |
| journal title | Journal of Manufacturing Science and Engineering | |
| identifier doi | 10.1115/1.2803644 | |
| journal fristpage | 29 | |
| journal lastpage | 36 | |
| identifier eissn | 1528-8935 | |
| keywords | Micromachining | |
| keywords | Shapes | |
| keywords | Thin films | |
| keywords | Finishes AND Masks | |
| tree | Journal of Manufacturing Science and Engineering:;1996:;volume( 118 ):;issue: 001 | |
| contenttype | Fulltext | |
