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RISExperimental Study on Aerodynamics of Microelectromechanical Systems Based Single Crystal Silicon Microscale Supersonic Nozzle
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: In this paper, the design, microfabrication, and direct measurement of the static pressure distribution for the aerodynamics of a singlecrystalsilicon microscale supersonic nozzle are described. The microscale supersonic ...