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RISMechanically Amplified 3-DoF Nonresonant Microelectromechanical Systems Gyroscope Fabricated in Low Cost MetalMUMPs Process
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: This paper introduces the design implementation of 3-DoF Microelectromechanical Systems (MEMS) based gyroscope concept, which allows shaping up the dynamic response without using advance control ...