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RISNonlinear Response of a Microbeam Under Combined Direct and Fringing Field Excitation
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Microelectromechanical system (MEMS) and Nanoelectromechanical system (NEMS) are mostly actuated by direct forcing due to electrostatic excitation. In general, the electrostatic forcing consists of two main components, the ...