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Examination of Bulge Test for Determining Residual Stress, Young’s Modulus, and Poisson’s Ratio of 3C-SiC Thin Films
Publisher: American Society of Civil Engineers
Abstract: Despite great advancements in thin-film growth and deposition techniques, determination of the residual stress and Young’s modulus for thin films has continued to be a challenge. The bulge test is a potentially powerful ...
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