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RISOn-the-Fly Substrate Eccentricity Recognition for Robotized Manufacturing Systems
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: This paper describes a method for on-the-fly determination of eccentricity of a circular substrate, such as a silicon wafer in semiconductor manufacturing applications, carried by a robotic ...
Active Vibration Control of Distributed Systems Using Delayed Resonator With Acceleration Feedback
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: The Delayed Resonator (DR) and Dual Frequency Fixed Delayed Resonator (DFFDR) are newly introduced control techniques for active vibration absorption. Both methods propose a delayed position ...