Search
Now showing items 1-1 of 1
Classification of Chip-Level Defect Types in Wafer Bin Maps Using Only Wafer-Level Labels
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Defective chips in wafer bin maps (WBMs) form different spatial patterns depending on the root causes of process failures. Therefore, the identification of defect patterns in WBMs can help practitioners identify the root ...
CSV
RIS