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RISDynamic Electromechanical Field Concentrations Near Electrodes in Piezoelectric Thick Films for the Design of MEMS Mirrors
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: This paper studies the dynamic electromechanical response of piezoelectric mirrors driven by piezoelectric lead zirconate titanate (PZT) thick films both numerically and experimentally. The resonant ...