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RISMicroelectromechanical Systems Cantilever Resonators Under Soft Alternating Current Voltage of Frequency Near Natural Frequency
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: This paper deals with nonlinearparametric frequency response of alternating current (AC) near natural frequency electrostatically actuated microelectromechanical systems (MEMS) cantilever resonators. The model includes ...