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RISNonlinear Response of a Microbeam Under Combined Direct and Fringing Field Excitation
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Microelectromechanical system (MEMS) and Nanoelectromechanical system (NEMS) are mostly actuated by direct forcing due to electrostatic excitation. In general, the electrostatic forcing consists of two main components, the ...
Frequency Analysis of Linearly Coupled Modes of MEMS Arrays
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Microelectromechanical system (MEMS) based arrays have been employed to increase the bandwidth and sensitivity of many sensors and actuators. In this paper, we present an approximate model to demonstrate the tuning of ...