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RISConceptual Design Optimization of Capacitive Pressure Sensors Via Finite Element Analysis With the Use of Anisotropic Behavior of Silicon ⟨111⟩ Crystal: Summary of Design Optimization Approaches
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Abstract. In the world of micro-mechanical design of micro-sensors, there has not been much substantial consideration given to the actual mechanical or structural aspect of the designs. Hence, most of the currently available ...