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RISDesign, Fabrication, and Characterization of a Micro Vapor-Jet Vacuum Pump
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: A microelectromechanical system (MEMS) vapor-jet pump for vacuum generation in miniaturized analytical systems, e.g., micro-mass-spectrometers (, , and , 2005, “ A Fully Integrated Micro Mass ...