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RISAn Experimental and Theoretical Investigation of the Mechanical Behavior of Multilayer Initially Curved Microplates Under Electrostatic Actuation
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: We investigate the static and dynamic behavior of a multilayer clamped-free–clamped-free (CFCF) microplate, which is made of polyimide, gold, chromium, and nickel. The microplate is slightly curved away from a stationary ...