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RISOccurrence of Dry-Out Phenomenon in an Auto Refrigerant Cascade Refrigerator Operating With Zeotropic Mixtures
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Auto refrigerant cascade (ARC) refrigerators are used extensively in the semiconductor manufacturing industry to provide refrigeration in the temperature range of 80–150 K. The performance of the ARC refrigerator depends ...