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RISA Kinematically Decoupled 6-Degree-of-Freedom Nanopositioning Stage With Minimized Crosstalk Based on Flexure Hinges
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Abstract. Six-degree-of-freedom (6-DOF) nanopositioning stages are indispensable in precision engineering. However, these stages currently exhibit significant crosstalk, which degrades their accuracy. This study proposes ...