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RISYield and Deformation in Biaxially Stressed Multilayer Metallic Thin Films
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: Multilayer thin films of CuNb, CuNi, and CuNbNi with 20 nm individual layer thicknesses were fabricated by magnetron sputtering on oxide coated silicon wafers. The mechanical properties of the ...