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Journal of Electronic Packaging
EISSN: 1944-7078
ISSN: 1530-9827
Priority: 4
Publisher: American Society of Mechanical Engineers
Description: The Journal of Computing and Information Science in Engineering publishes archival research results and advanced technical applications More ...
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Theoretical Analysis and Experimental Quantification of the Gas Leakage Due to Electrical Feedthroughs in Anodic Bonding
Publisher: The American Society of Mechanical Engineers (ASME)
Abstract: In this paper, theoretical analysis and experimental quantification of the gas leakage issue due to feedthroughs in anodic bonding are presented. The theoretical analysis was conducted to quantitatively analyze the influence ...