contributor author | Kazuyoshi Fushinobu | |
contributor author | Masashi Nakata | |
date accessioned | 2017-05-09T00:15:53Z | |
date available | 2017-05-09T00:15:53Z | |
date copyright | June, 2005 | |
date issued | 2005 | |
identifier issn | 1528-9044 | |
identifier other | JEPAE4-26243#141_1.pdf | |
identifier uri | http://yetl.yabesh.ir/yetl/handle/yetl/131653 | |
description abstract | A microfluidic mixing device for microsystems with electroosmotic flow (EOF)-driven liquid pumping is proposed and examined experimentally and numerically. Microchannels with SiO2 or Al2O3 wall are fabricated by using surface micromachining technique, and the EOF velocity for each microchannel is measured. A sample device where part of the SiO2 wall is covered with a patterned Al2O3 thin film is fabricated to demonstrate the proposed flow pattern change. Results of numerical calculations suggest mixing enhancement effect. | |
publisher | The American Society of Mechanical Engineers (ASME) | |
title | An Experimental and Numerical Study of a Liquid Mixing Device for Microsystems | |
type | Journal Paper | |
journal volume | 127 | |
journal issue | 2 | |
journal title | Journal of Electronic Packaging | |
identifier doi | 10.1115/1.1869511 | |
journal fristpage | 141 | |
journal lastpage | 146 | |
identifier eissn | 1043-7398 | |
keywords | Flow (Dynamics) | |
keywords | Manufacturing | |
keywords | Electroosmosis | |
keywords | Microchannels | |
keywords | Microelectromechanical systems AND Channels (Hydraulic engineering) | |
tree | Journal of Electronic Packaging:;2005:;volume( 127 ):;issue: 002 | |
contenttype | Fulltext | |