| contributor author | D. Croft | |
| contributor author | D. McAllister | |
| contributor author | S. Devasia | |
| date accessioned | 2017-05-08T23:57:11Z | |
| date available | 2017-05-08T23:57:11Z | |
| date copyright | August, 1998 | |
| date issued | 1998 | |
| identifier issn | 1087-1357 | |
| identifier other | JMSEFK-27331#617_1.pdf | |
| identifier uri | http://yetl.yabesh.ir/yetl/handle/yetl/120749 | |
| description abstract | Low scanning speed of piezo-probes has been a fundamental limitation of scanning probe based nano-fabrication techniques. Typical scan-rates achieved are limited, by structural vibrations of the piezo-probe, to about 1/10th the fundamental vibrational frequency of the piezo-probe. Faster scanning of piezo-probes is achieved here (experimental results are presented) by using inversion of the piezo-dynamics—this approach uses a feedforward input voltage, applied to piezo-probe, to compensate for piezo vibrations. | |
| publisher | The American Society of Mechanical Engineers (ASME) | |
| title | High-Speed Scanning of Piezo-Probes for Nano-fabrication | |
| type | Journal Paper | |
| journal volume | 120 | |
| journal issue | 3 | |
| journal title | Journal of Manufacturing Science and Engineering | |
| identifier doi | 10.1115/1.2830166 | |
| journal fristpage | 617 | |
| journal lastpage | 622 | |
| identifier eissn | 1528-8935 | |
| keywords | Nanofabrication | |
| keywords | Probes | |
| keywords | Vibration | |
| keywords | Feedforward control | |
| keywords | Dynamics (Mechanics) AND Electric potential | |
| tree | Journal of Manufacturing Science and Engineering:;1998:;volume( 120 ):;issue: 003 | |
| contenttype | Fulltext | |
